Apparatus for probing multiple integrated circuit devices
US7436171B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2007 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Nov 23, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probing apparatus comprises a platform with a rectangular opening, two vertical rails positioned at two sides of the rectangular opening, two vertical sliding modules each including a vertical sliding base positioned on the vertical rail, a bearing member and a pivot connecting the vertical sliding base and the bearing member, at least one non-circular lateral rail with two ends positioned on the bearing member of the vertical sliding module, at least one lateral sliding module each including a lateral sliding base positioned on the lateral rail and a hanger positioned on the lateral sliding base, and at least one tunable stage configured to hang on the non-circular lateral rail via the hanger of the lateral sliding module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.