Wide range pressure control using turbo pump
US7438534B2 · kind B2 · utility
2Cited by
5References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2005 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Jun 15, 2026 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D27/0253
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.