Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
US7439006B2 · kind B2 · utility
32Cited by
6References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2007 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Aug 10, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/122
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A salt represented by the formula (I):wherein X represents a C1-C12 divalent linear or branched chain hydrocarbon group, Y represents a C1-C30 hydrocarbon group which may be substituted with at least one substituent, and at least one —CH2— in the C1-C30 hydrocarbon group may be substituted with —O— or —CO—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents an organic counter ion.The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.