Yukako Harada
16Patents
8h-index
11Co-inventors
61Inventor score
Filing activity: Feb 14, 2006 → Mar 18, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7304175B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Chemistry; Metallurgy | 65 | Expired |
| US7301047B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Chemistry; Metallurgy | 33 | Active |
| US7439006B2 | Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same | Emerging Cross-Sectional Technologies | 32 | Active |
| US7579132B2 | Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same | Emerging Cross-Sectional Technologies | 25 | Active |
| US7612217B2 | Sulfonium compound | Chemistry; Metallurgy | 25 | Active |
| US8124803B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Chemistry; Metallurgy | 22 | Active |
| US7262321B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Chemistry; Metallurgy | 20 | Active |
| US7932334B2 | Resin suitable for an acid generator | Chemistry; Metallurgy | 19 | Active |
| US7786322B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Physics | 7 | Active |
| US7579497B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Physics | 6 | Active |
| US7531686B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Chemistry; Metallurgy | 6 | Active |
| US7527910B2 | Salt suitable for an acid generator and a chemically amplified resist composition containing the same | Emerging Cross-Sectional Technologies | 2 | Active |
| US7667050B2 | Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same | Chemistry; Metallurgy | 0 | Active |
| US7862980B2 | Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same | Emerging Cross-Sectional Technologies | 0 | Active |
| US8378016B2 | Chemically amplified positive resist composition | Chemistry; Metallurgy | 0 | Active |
| US7759045B2 | Chemically amplified positive resist composition | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.