Ion source with removable anode assembly
US7439521B2 · kind B2 · utility
4Cited by
10References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2007 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Jan 12, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/146
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.