Semiconductor device having a lateral channel and contacts on opposing surfaces thereof
US7439557B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2005 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Mar 29, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/256
Abstract
A semiconductor device having a lateral channel with contacts on opposing surfaces thereof and a method of forming the same. In one embodiment, the semiconductor device includes a conductive substrate having a first contact covering a substantial portion of a bottom surface thereof. The semiconductor device also includes a lateral channel above the conductive substrate. The semiconductor device further includes a second contact above the lateral channel. The semiconductor device still further includes an interconnect that connects the lateral channel to the conductive substrate. The interconnect is operable to provide a low resistance coupling between the first contact and the lateral channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.