Measuring instrument, in particular for transmission measurement in vacuum system
US7443518B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2006 |
| Grant date | Oct 28, 2008 |
| Priority date | — |
| Expiry date | Apr 12, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/5996
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflector for reflection of the emitted light beam. The measuring instrument allows transmission measurements to be carried out on transparent substrates with only one reflection measuring head. The measuring instrument also allows reflection measurements to be carried out, for example on non-transparent substrates or by tilting the measuring head and covering the retro-reflector. The measuring instrument only requires one measuring head and can therefore be produced more cost-effectively. It does not require calibration, as the retro-reflector also reflects the light in the original direction in the case of oblique incidence and in the event of positional changes caused by process or operational factors (vibrations etc.).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.