Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7450295B2 · kind B2 · utility
62Cited by
368References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2006 |
| Grant date | Nov 11, 2008 |
| Priority date | — |
| Expiry date | Mar 2, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31935
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.