Patent assignee · US · COMPANY

QUALCOMM MEMS Technologies, Inc.

590Patents
545Active
590Granted
64Portfolio score

Filing activity: Mar 26, 2003 → Feb 20, 2015 · 376 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8816567B2 Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression Emerging Cross-Sectional Technologies 187 Active
US9305497B2 Systems, devices, and methods for driving an analog interferometric modulator Physics 144 Active
US7198973B2 Method for fabricating an interference display unit Physics 118 Expired
US7750886B2 Methods and devices for lighting displays Electricity 86 Active
US7172915B2 Optical-interference type display panel and method for making the same Physics 83 Expired
US8348489B2 Thin illumination system Physics 79 Active
US8724038B2 Wraparound assembly for combination touch, handwriting and fingerprint sensor Emerging Cross-Sectional Technologies 76 Active
US7679812B2 Support structure for MEMS device and methods therefor Performing Operations; Transporting 65 Active
US7417784B2 Microelectromechanical device and method utilizing a porous surface Performing Operations; Transporting 65 Expired
US7385744B2 Support structure for free-standing MEMS device and methods for forming the same Performing Operations; Transporting 63 Active
US7450295B2 Methods for producing MEMS with protective coatings using multi-component sacrificial layers Emerging Cross-Sectional Technologies 62 Expired
US7719500B2 Reflective display pixels arranged in non-rectangular arrays Physics 57 Active
US7852544B2 Separable modulator Physics 56 Active
US7898722B2 Microelectromechanical device with restoring electrode Emerging Cross-Sectional Technologies 55 Active
US7342709B2 Optical interference type of color display having optical diffusion layer between substrate and electrode Physics 53 Expired
US7603001B2 Method and apparatus for providing back-lighting in an interferometric modulator display device Physics 52 Expired
US7550810B2 MEMS device having a layer movable at asymmetric rates Physics 51 Expired
US7535621B2 Aluminum fluoride films for microelectromechanical system applications Performing Operations; Transporting 50 Active
US9263370B2 Semiconductor device with via bar Electricity 50 Active
US7566664B2 Selective etching of MEMS using gaseous halides and reactive co-etchants Performing Operations; Transporting 49 Active
US7733439B2 Dual film light guide for illuminating displays Physics 48 Active
US7527995B2 Method of making prestructure for MEMS systems Performing Operations; Transporting 48 Expired
US7629197B2 Spatial light modulator Physics 44 Active
US7569488B2 Methods of making a MEMS device by monitoring a process parameter Performing Operations; Transporting 44 Active
US7706050B2 Integrated modulator illumination Physics 43 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.