Dimensional calibration standards
US7453571B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2007 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | Nov 27, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or substantially non-perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the standard may form a viewing surface of the calibration standard. The standard may include at least one layer disposed between the first and second substrates. The layer, or a feature etched into the first or second substrate or a feature etched into the layer may have a traceably measured thickness or may be oriented at a traceably measured angle with respect to the viewing surface. A thickness or angle of the layer or other feature may be traceably measured using any technique for calibrating a measurement system with a standard reference material traceable to a national testing authority.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.