Assessment and optimization for metrology instrument including uncertainty of total measurement uncertainty
US7453583B2 · kind B2 · utility
1Cited by
5References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2007 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | Oct 3, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation. The invention also includes a method for determining an uncertainty of the TMU.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.