Patent · US Active

Adjustment arrangement of an optical element

US7457059B2 · kind B2 · utility

1Cited by

18References

49Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Klaus Beck · Oberkochen, DE
Bernhard Gellrich · Aalen, DE
Hubert Holderer · Oberkochen, DE
Thomas Petasch · Aalen, DE
Cornelia Roesch · Oberkochen, DE
Alexander Kohl · Aalen, DE

Key dates

Filing date	Sep 20, 2006
Grant date	Nov 25, 2008
Priority date	—
Expiry date	Sep 20, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.