In-line filter in a diffusion bonded layered substrate

US7459003B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Mark Crockett · Foster City, US
• John W. Lane · Austin, US
• Micahel DeChellis · Austin, US
• Chris Melcer · Sunnyvale, US
• Erica Porras · San Jose, US
• Aneesh Khullar · Sunnyvale, US
• Balarabe Mohammed · Union City, US

Key dates

• Filing date: Oct 3, 2006
• Grant date: Dec 2, 2008
• Expiry date: Oct 3, 2026

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49906
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.