Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma
US7460646B2 · kind B2 · utility
1Cited by
6References
32Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 9, 2004 |
| Grant date | Dec 2, 2008 |
| Priority date | — |
| Expiry date | Feb 4, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0027
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A method for generating extreme ultraviolet and/or soft X-ray radiation by a plasma that can be generated through irradiation of a material. In order to obtain a reduction in the contamination of an optical illumination system as well as an instantaneous optimization of the power of a radiation source, at least a quantity of the material is controlled by a blocking device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.