Inventor · Aachen, DE

Peter Zink

12Patents
4h-index
18Co-inventors
57Inventor score

Filing activity: May 11, 1988 → May 21, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US4914895A Device for filling and closing sacks, in particular paper side folding sacks Performing Operations; Transporting 12 Expired
US8097092B2 Method of cleaning and after treatment of optical surfaces in an irradiation unit Performing Operations; Transporting 9 Active
US8945310B2 Method and device for cleaning at least one optical component Physics 7 Active
US8076655B2 Method of cleaning optical surfaces of an irradiation unit in a two-step process Physics 5 Active
US7809112B2 Method and device for generating EUV radiation and/or soft X-ray radiation Physics 1 Expired
US8519368B2 Method and device for generating EUV radiation or soft X-rays Electricity 1 Active
US7460646B2 Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma Electricity 1 Expired
US8101930B2 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device Physics 0 Active
US10933539B2 Gripping devices and methods for making the same Performing Operations; Transporting 0 Active
US7732789B2 Optical system having a cleaning arrangement Physics 0 Active
US9897724B2 Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity Chemistry; Metallurgy 0 Active
US9110390B2 Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.