Plasma-assisted nitrogen surface-treatment
US7465362B2 · kind B2 · utility
3Cited by
178References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2003 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | Aug 28, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C8/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods and systems (10) for plasma-assisted nitrogen surface-treatments are provided. The method can include subjecting a gas (24) to electromagnetic radiation (26) in the presence of a plasma catalyst (100, 120, 140) to initiate a plasma containing nitrogen. The surface region of an object can be exposed to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the surface region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.