Application of impressed-current cathodic protection to prevent metal corrosion and oxidation
US7468321B2 · kind B2 · utility
4Cited by
12References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2006 |
| Grant date | Dec 23, 2008 |
| Priority date | — |
| Expiry date | Jan 1, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/30105
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A new method is provided for the processing of metals, most notably copper, such that damage to exposed surfaces of these metals is prevented. During a step of semiconductor processing, which results in exposing a metal surface to a wet substance having a pH value, a voltage is applied to the metal that is exposed. The value of the applied voltage can, dependent on the value of the pH constant of the wet substance, be selected such that the exposed metal surface is protected against alkaline effects of the wet substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.