Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element
US7471031B2 · kind B2 · utility
10Cited by
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19Claims
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Key dates
| Filing date | Sep 20, 2005 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Oct 15, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2210/033
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.