Patent · US Active

Semiconductor integrated circuit tester with interchangeable tester module

US7471100B2 · kind B2 · utility

4Cited by

6References

11Claims

0Family size

Assignee

Credence Systems Corporation · US

Inventors

Wayne Miller · Mountain View, US
Carlos Ramos · San Jose, US
Peter S. Young · San Francisco, US

Key dates

Filing date	Nov 5, 2007
Grant date	Dec 30, 2008
Priority date	—
Expiry date	Nov 5, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2886
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A test head for an integrated circuit tester includes a main chassis defining a chamber that is open at the top. Tester modules are installed in the chamber, each tester module being removable as a unit from the chamber and including a tester module chassis, multiple pin electronics cards, and a tester module interface structure exposed at the top of the chamber. A test head interface structure is engageable with the tester module interface structures of the tester modules for connecting the tester module interface structures to a device interface unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.