Systems and methods for generating laser light shaped as a line beam

US7471455B2 · kind B2 · utility

Assignee

• Cymer, LLC · US

Inventors

• Palash P. Das · Vista, US
• Albert Cefalo · San Diego, US
• David S. Knowles · San Diego, US
• Vitaliy Shklover · Heidenheim, DE
• Holger Muenz · Aalen, DE

Key dates

• Filing date: Oct 28, 2005
• Grant date: Dec 30, 2008
• Expiry date: Jul 20, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/004
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Systems and methods are disclosed for shaping a laser beam for interaction with a film in which the laser beam travels along a beam path and defines a short-axis and a long-axis. In one aspect, the system may include a first short-axis element having an edge positioned at a distance, d1, along the beam path from the film and a second short-axis element having an edge positioned at a distance, d2, along the beam path from the film, with d2<d1. An optic may be positioned along the beam path between the second element and the film for focusing the beam in the short-axis for interaction with the film. In another aspect, a system may be provided having a mechanism operative to selectively adjust the curvature of one or both of the edges of the short-axis element.