Patent · US Active

Semiconductor device having body contact through gate and method of fabricating the same

US7473590B2 · kind B2 · utility

1Cited by
9References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 7, 2005
Grant dateJan 6, 2009
Priority date
Expiry dateJul 14, 2026

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D88/01
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

According to an embodiment of the invention, a lower transistor is formed on a semiconductor substrate, and an upper thin film transistor is formed on the lower transistor. A body contact plug is formed to penetrate an upper gate electrode of the upper thin film transistor and a body pattern, and to electrically connect with a lower gate electrode of the lower transistor. The body contact plug uses a contact hole to apply an electrical signal to the upper gate electrode of the upper thin film transistor, so additional volume is not necessary. Since the upper gate electrode is electrically connected to the body pattern through the body contact plug, the floating body effect of the upper thin film transistor can be improved. Therefore, a semiconductor device is provided with the high performance required to realize a highly-integrated semiconductor device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.