Gas distributor for ion source
US7476869B2 · kind B2 · utility
5Cited by
11References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2007 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Jan 12, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/146
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The gas distributor may be mounted to a thermal control plate in the anode assembly with several set screws. The gas distributor may be disk-shaped with counterbores in a surface to recess the heads of the set screws. Alternately, the gas distributor may be clamped or held in place by other structures or components of the ion source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.