Trench measurement system employing a chromatic confocal height sensor and a microscope
US7477401B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2005 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Oct 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for the measurement of high aspect ratio trenches. The preferred embodiment consists of three elements: a) an integrated microscope and optical height sensor, b) an axially dispersive, afocal lens system, which is included in the optical height sensor, and c) an algorithm for processing the optical height sensor data to produce the depth of the high aspect ratio trench. The present invention combines a traditional imaging microscope with a chromatic confocal, single point, height sensor. This combination instantaneously provides an image of the object and the height value at one point in the image. No mechanical movement is necessary anywhere in the system to achieve that result. The chromatic confocal height sensor is integrated with a traditional microscope through the use of separate wavelength bands such as a wavelength band in the visible part of the spectrum, and a wavelength band in the infrared or ultraviolet part of the spectrum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.