Method and system for facilitating preventive maintenance of an optical inspection tool
US7478014B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2006 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Dec 11, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70975
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of determining preventive maintenance for an optical inspection system for inspecting photolithography processed substrates. The method includes measuring at least one operational characteristic of the optical inspection system and comparing a measurement result for said at least one operational characteristic with predetermined preventive maintenance criteria for the operational characteristic. Also included is determining a preventive maintenance requirement based on a comparison result of said comparing, and initiating a preventive maintenance action on said optical inspection system, said preventive maintenance action corresponding to said preventive maintenance requirement. A method of automatically performing preventive maintenance on an optical inspection system, and for retrofitting an optical inspection system to facilitate preventive maintenance of the optical inspection system are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.