Method for producing cavities having optically transparent wall

US7479234B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hubert Benzel · Neckartenzlingen, DE
• Heribert Weber · Leverkusen, DE
• Frank Schaefer · Lörrach, DE

Key dates

• Filing date: Sep 4, 2002
• Grant date: Jan 20, 2009
• Expiry date: Sep 4, 2022

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/014
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method is proposed which will enable cavities having optically transparent walls to be produced simply and cost-effectively in a component by using standard methods of microsystems technology. For this purpose, a silicon region is first produced, which is surrounded on all sides by at least one optically transparent cladding layer. At least one opening is then produced in the cladding layer. Over this opening, the silicon surrounded by the cladding layer is dissolved out, forming a cavity within the cladding layer. In this context, the cladding layer acts as an etch barrier layer.