Apparatus and method for hard-docking a tester to a tiltable imager
US7480051B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2005 |
| Grant date | Jan 20, 2009 |
| Priority date | — |
| Expiry date | Jan 20, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method are disclosed for hard-docking of a tester head to a DUT, while permitting the angular alignment of a specimen to be inspected to the optical axis of an optical testing tool. In one example, a system for orthogonal alignment of a specimen to an optical axis of a collection optics is provided. The system comprises a self-leveling tabletop; a specimen holder coupled to the tabletop and held at a fix orientation; collection optics coupled to the tabletop; a plunger coupled to the tabletop and operable to maintain the leveling orientation of the tabletop; a control valve sensing the leveling orientation of the tabletop and coupled to the plunger to control the operation of the plunger; and an aligner coupled to the tabletop and operable to change the alignment of the optical axis of the collection optics with respect to the specimen without changing the fixed orientation of the specimen holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.