Apparatus for multiple beam deflection and intensity stabilization
US7483196B2 · kind B2 · utility
11Cited by
16References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2003 |
| Grant date | Jan 27, 2009 |
| Priority date | — |
| Expiry date | Sep 1, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70291
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multiple beam generator for use in a scanning system, wherein the generator includes an acousto-optic deflector (AOD) which during use receives a laser beam and generates a deflected beam, the deflection of which is determined by an AOD control signal; a diffractive element which generates an array of input beams from the deflected beam; and a control circuit which during operation generates the AOD control signal and varies a characteristic of the first control signal to account for errors in the scanning system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.