Flexible metal-oxide-metal capacitor design
US7485912B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 28, 2006 |
| Grant date | Feb 3, 2009 |
| Priority date | — |
| Expiry date | Apr 27, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A flexible scheme for forming a multi-layer capacitor structure is provided. The multi-layer capacitor structure includes a first electrode and a second electrode extending through at least one metallization layer, wherein the first electrode and the second electrode are separated by dielectric materials. In each of the metallization layers, the first electrode comprises a first bus and first fingers connected to the first bus, wherein the first bus comprises a first leg in a first direction, and wherein the first fingers are parallel to each other and are in a second direction. The first direction and the second direction form an acute angle. In each of the metallization layers, the second electrode comprises a second bus and second fingers connected to the second bus, wherein the second fingers are parallel to the first fingers in a same metallization layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.