Method of inspecting for defects and apparatus for performing the method
US7486392B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2006 |
| Grant date | Feb 3, 2009 |
| Priority date | — |
| Expiry date | Oct 14, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4738
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method of inspecting an object, a first light is irradiated onto a bare object and a first reflection signal is reflected from the bare object. A second light is irradiated onto a processed object and a second reflection signal is reflected from the processed object. The first and second reflection signals are differentiated, to thereby generate respective first and second differential signals. A defect on the processed object is detected by a comparison between the first and second differential signals. The first and second differential signals overlap with each other and at least one signal-deviation portion is detected. The first and second differential signals are spaced apart out of an allowable error range in the signal-deviation portion. The defect is detected from a portion of the processed object corresponding to the signal-deviation portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.