Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane
US7489389B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 8, 2005 |
| Grant date | Feb 10, 2009 |
| Priority date | — |
| Expiry date | Jun 8, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage device includes a stage and a frame-shaped member that move in three degrees of freedom directions in a two-dimensional plane while floating above a surface plate. The stage also holds an object. First fixed elements and second fixed elements are fitted to the frame-shaped member, and cooperate with first movable elements and second movable elements to generate drive forces to drive the stage in the two-dimensional plane. A reaction force generated by the driving of the stage acts on the first and/or second fixed elements, and causes the frame-shaped member to move in the two-dimensional plane. Because the reaction force caused by the movement of the stage is substantially completely cancelled, and because the movement of a center of gravity of a system including the stage and the frame-shaped member does not occur, no unbalanced load acts on the surface plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.