Scanning microscope
US7492511B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2005 |
| Grant date | Feb 17, 2009 |
| Priority date | — |
| Expiry date | Nov 28, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0032
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to a scanning microscope comprising a beam deflecting device (11), which directs an illuminating light beam (5) over or through a sample (21), and comprising a detector (33) for receiving detection light (23) exiting the sample. The scanning microscope comprises an extracting port (67) or another detector (37) and comprises a redirecting device (27), which is synchronized with the beam deflecting device and which directs the detection light according to the deflecting position of the beam deflecting device either to the detector or to the extracting port or to the other detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.