Patent · US Expired

Scanning microscope

US7492511B2 · kind B2 · utility

2Cited by
2References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 20, 2005
Grant dateFeb 17, 2009
Priority date
Expiry dateNov 28, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/0032
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The invention relates to a scanning microscope comprising a beam deflecting device (11), which directs an illuminating light beam (5) over or through a sample (21), and comprising a detector (33) for receiving detection light (23) exiting the sample. The scanning microscope comprises an extracting port (67) or another detector (37) and comprises a redirecting device (27), which is synchronized with the beam deflecting device and which directs the detection light according to the deflecting position of the beam deflecting device either to the detector or to the extracting port or to the other detector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.