Micromechanical component having a diaphragm

US7495302B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Frank Fischer · Mesa, US
• Hans Artmann · Magstadt, DE
• Lars Metzger · Albstadt, DE
• Arnim Hoechst · Lörrach, DE
• Julian Gonska · Reutlingen, DE

Key dates

• Filing date: Mar 3, 2005
• Grant date: Feb 24, 2009
• Expiry date: Nov 9, 2025

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0109
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component having a diaphragm is provided, the structure of which effectively prevents the penetration of dirt particles into the cavity. A method for manufacturing such a component is also provided. The structure of the component is implemented in a layer structure which includes at least one first sacrificial layer and a layer system over the first sacrificial layer. A cavity is formed in the first sacrificial layer underneath the diaphragm. In the region of the diaphragm between the upper layer and the lower layer of the layer system situated directly above the first sacrificial layer, at least one access channel to the cavity is formed which has at least one opening in the upper layer and at least one opening in the lower layer, the opening in the upper layer and the opening in the lower layer being offset with respect to each other.