Probe with embedded heater for nanoscale analysis
US7497613B2 · kind B2 · utility
22Cited by
11References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2006 |
| Grant date | Mar 3, 2009 |
| Priority date | — |
| Expiry date | Apr 18, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is a heated thermal probe suitable for use in micro-thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever with a sharp probe tip of a type used in Scanning Probe Microscopes (SPM's) which further includes an integral resistive heating element. The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.