Method and structure for an out-of plane compliant micro actuator
US7498715B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Oct 31, 2006 |
| Grant date | Mar 3, 2009 |
| Priority date | — |
| Expiry date | Oct 31, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.