Combined vacuum pump load-lock assembly
US7500822B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2004 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Oct 18, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/601
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A load-lock and dry vacuum pump assembly includes a load-lock having a load-lock housing, the load-lock housing includes a mating system having a flange-like cylinder and a cylinder concentrically located relative to said flange-like cylinder; a dry vacuum pump that includes a shaft, a rotor, a first concentric cylinder and a second concentric cylinder extending outwardly from the rotor, and is integrally connected with the mating system, the first and second dry vacuum pump concentric cylinders, the flange-like cylinder, and the cylinder concentrically located relative to said flange being axially arranged with respect to the shaft; and a molecular drag compression stage formed by flanges having helical structures selectively provided on the first and second concentric cylinders, the flange-like cylinder, and the cylinder concentrically located relative to the flange. The first and second concentric cylinders spin relative to the flange-like cylinder and the cylinder concentrically located relative to the flange.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.