Temperature insensitive low coherence based optical metrology for nondestructive characterization of physical characteristics of materials
US7502121B1 · kind B1 · utility
5Cited by
7References
4Claims
0Family size
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Key dates
| Filing date | Nov 24, 2004 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Nov 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention is a device for measuring of absolute distances by means of low coherence optical interferometry. The proposed apparatus eliminates thermal of the conventional fiber optic interferometers caused by variation of the refractive index of the optical fiber material to change of the temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.