Fiber-optic miniature encoder for fine pitch scales
US7502122B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2006 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Oct 19, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into +/− 1st order beams, a pair of mirrors that reflect the +/− 1st order beams to converge toward the scale grating. The +/− 1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only +/− 1st order light reaches the receiver channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.