Methods of fabricating optimization involving process sequence analysis
US7502658B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2008 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Feb 19, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An exemplary method for performing fabrication sequence analysis, the method comprising, defining a process group, wherein a process group includes fabrication processes in a fabrication sequence, determining fabrication process paths in the process group to define independent variables, wherein a process path is a plurality of fabrication equipment used to fabricate a particular semiconductor device in the fabrication sequence, receiving a dependent variable for the fabrication sequence, performing analysis of variance to calculate a p-value for the process group, determining whether the p-value is lower than a threshold value, identifying a poor process path responsive to determining that the p-value is lower than a threshold value, and outputting the identified poor process path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.