System, method, and apparatus for mechanically releasable slider processing including lapping, air bearing patterning, and debonding
US7504038B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2004 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Sep 23, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/127
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A mechanically releasable slider process utilizes silicone rubber or PDMS to take the function of a planarization material for individual sliders or slider rows. Mechanical debonding takes advantage of the rubber-elastic property of PDMS. A gripper is used in a virtually solvent-free, air bearing patterning UV-molding process and resist-based processes. A PDMS-based fixture is used during both the lapping process and the photo or UV-mold patterning of the ABS surface. This fixture can mechanically hold sliders by large area reversible adhesion while allowing gimbaling, electrical connection, actuation, UV-molding or photolithography, and mechanical release, thus reducing the number of slider manipulations to two.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.