Polyorganosiloxane dielectric materials
US7504470B2 · kind B2 · utility
0Cited by
8References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2005 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Dec 26, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A thin film comprising a composition obtained by polymerizing a monomer having the formula I:wherein:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.