Wafer carrier
US7505118B2 · kind B2 · utility
4Cited by
10References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 12, 2004 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Nov 19, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7003
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A wafer carrier for carrying a wafer includes a transparent base and a conducting layer. The transparent base has dimensions similar to that of the wafer, and bonds the wafer with a bonding layer. The conducting layer is transparent, and can be attracted by an electrostatic chuck so that the electrostatic chuck can deliver the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.