Dynamic reference plane compensation
US7505143B2 · kind B2 · utility
0Cited by
22References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 2005 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Dec 19, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/6052
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a method of dynamic reference plane compensation, comprises impinging radiation from a first radiation source onto a surface of an object; generating an uncompensated measurement signal from radiation reflected from a first location on the surface and a second location; generating a compensation signal from radiation reflected from a third location and a fourth location on the surface; and generating a compensated measurement signal using the uncompensated measurement signal and the compensation signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.