Efficient calculation of grating matrix elements for 2-D diffraction
US7505147B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 2006 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Apr 15, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70625
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Improved computation of Fourier coefficients for modeling of 2-D grating diffraction is provided. Let f(x,y) be defined in a region Ω. Typically, f(x,y) is piecewise constant (since it is a grating permittivity or inverse permittivity) and takes on various constant values in several domains in Ω. Let D be one of these domains, having a general shape. According to the invention, D is approximated as a set of trapezoids, and f(x,y) is taken to have a constant value within each of the trapezoids. Since the Fourier coefficient of a constant defined on a trapezoidal region can be analytically evaluated, an analytic approximation to the Fourier coefficient of f(x,y) on D is provided by summing the contributions from each trapezoid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.