Apparatus for surface inspection and method and apparatus for inspecting substrate
US7505149B2 · kind B2 · utility
5Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2005 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Jan 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30152
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A target object has its surface condition inspected by having its image taken from above while being irradiated by red, green and blue light beams at different elevation angles. An inspection area is set on the image and a direction is extracted on the image in which a change appears in the color phase according to the arrangement of the light sources and this extracted direction is compared with a preliminarily registered standard direction to judge the surface condition from the result of this comparison.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.