Method and system for monitoring test signals for semiconductor devices
US7508228B2 · kind B2 · utility
3Cited by
25References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2005 |
| Grant date | Mar 24, 2009 |
| Priority date | — |
| Expiry date | Dec 21, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2029/5602
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device tester includes a parametric measurement unit (PMU) driver circuit that provides a DC test signal for testing a semiconductor device, and a feedback circuit that senses the DC test signal at an output of the PMU driver circuit and sends the sensed DC test signal to an input of the PMU driver circuit for compensating the DC test signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.