Acceleration sensor with redundant contact holes
US7509859B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 12, 2007 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | Dec 12, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member A dielectric film formed on the supporting member and the beam has multiple contact holes disposed over each low-resistance area. Wiring formed on the dielectric film is connected to the low-resistance areas through the contact holes. The provision of multiple contact holes for each low-resistance area extends the life of the acceleration sensor by preventing sensor failure due to the separation or other failure of any single contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.