Reversible photobleachable materials based on nano-sized semiconductor particles and their optical applications
US7510818B2 · kind B2 · utility
3Cited by
17References
72Claims
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Key dates
| Filing date | Dec 9, 2003 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | May 27, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24893
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.