Scanning probe microscope for measuring angle and method of measuring a sample using the same
US7514679B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2006 |
| Grant date | Apr 7, 2009 |
| Priority date | — |
| Expiry date | May 31, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a scanning probe microscope (SPM) that prevents a distortion of an image caused by alignment errors of scanners and a method of measuring a sample using the same. The scanning probe microscope comprises a probe; a first scanner changing a position of the probe along a straight line; a second scanner changing a position of a sample in a plane; and an adjusting device adjusting a position of the second scanner or the first scanner so that the straight line where the position of the probe is changed using the first scanner is perpendicular to the plane in which the position of the sample is changed using the second scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.