Z offset MEMS device
US7516661B2 · kind B2 · utility
1Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2006 |
| Grant date | Apr 14, 2009 |
| Priority date | — |
| Expiry date | May 8, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical system (MEMS) device with a mechanism layer having a first part and a second part, and at least one cover for sealing the mechanism layer. The inner surface of at least one of the covers is structured such that a protruding structure is present on the inner surface of the cover and wherein the protruding structure mechanically causes the first part to be deflected out of a plane associated with the second part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.