Grooved retaining ring
US7520795B2 · kind B2 · utility
4Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2006 |
| Grant date | Apr 21, 2009 |
| Priority date | — |
| Expiry date | Aug 29, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/32
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A retaining ring for chemical mechanical polishing is described. The ring has a bottom surface with non-intersecting grooves. Alternating grooves are at opposing angles to one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.